Sensors, Vol. 21, Pages 6428: A Novel High-Q Dual-Mass MEMS Tuning Fork Gyroscope Based on 3D Wafer-Level Packaging

Added 29 days ago (26.09.2021)
Authors: Pengfei Xu; Chaowei Si; Yurong He; Zhenyu Wei; Lu Jia; Guowei Han; Jin Ning; Fuhua Yang
Journal: Sensors
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